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4-inch work platform semiconductor inspection microscope
The 4-inch work platform semiconductor inspection microscope adopts a large stroke mobile work platform and a long working distance semi apochromatic
Product details
4-inch work platform semiconductor inspection microscope
Steady rack structure design
The industrial inspection grade microscope body, low center of gravity, high rigidity, and high stability metal frame ensure the seismic resistance and imaging stability of the system.
Its front low hand position coarse fine adjustment coaxial focusing mechanism is equipped with a 100-240V wide voltage transformer, which can adapt to the grid voltage in different regions. The base is designed with a wind circulation cooling system inside, which will not cause the rack to overheat even after long-term use.
Reflective Illuminator
Single high-power 5W white LED lighting with oblique lighting mechanism. When switching to oblique lighting, different material parts on the surface of the object can present three-dimensional patterns, increasing the contrast and visual effect of observation.
High performance objective lens converter
The MX4R converter adopts precision bearing design, with a light and comfortable rotating feel, high repeatability positioning accuracy, and good control of the concentricity of the objective lens after conversion. Different hole positions of the converter can be configured according to requirements.
MX4RConfiguration parameters of semiconductor inspection microscope
Model number |
MX4R |
MX4RT |
Optional observation methods |
Bright field/oblique illumination/polarized light/DIC |
Bright field/oblique illumination/polarized light/DIC/transmitted light |
Optical system |
Infinite chromatic aberration correction optical system |
|
Eyepiece |
PL10X/22 flat field high eye point eyepiece |
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Observation tube |
30 ° hinge type three eyes, spectral ratio, binocular: three eyes=100:0 or 50:50 |
|
Objective lens |
LMPL infinite long working distance metallographic objective 5X, 10X, 20X, 50X, 100X |
|
Converter |
5-hole inward tilting converter with DIC slot |
|
Carrier platform |
4” Double layer mechanical mobile platform with a stroke of 105x 105mm, equipped with a metal flat platform, right-hand X and Y mobile handwheels, and a platform interface |
4” Double layer mechanical mobile platform, stroke 105x 105mm, with glass platform, right-hand X and Y mobile handwheels, equipped with platform interface |
Microscope body |
Coarse adjustment coaxial, coarse adjustment stroke 33mm, fine adjustment accuracy 0.001mm, with upper limit of coarse adjustment mechanism and tension adjustment device. Built in 90-240V wide voltage transformer, single power output |
Coarse adjustment coaxial, coarse adjustment stroke 33mm, fine adjustment accuracy 0.001mm, with upper limit of coarse adjustment mechanism and tension adjustment device. Built in 90-240V wide voltage transformer, dual power output |
Reflective Illuminator System |
Equipped with variable field of view aperture and aperture aperture, both can be centered; Equipped with color filter slots and polarizing device slots; Switching lever with oblique lighting. 12V100W halogen lamp, continuously adjustable light intensity (MX-6R microscope lens should be used when selecting this set of lighting fixtures) |
|
Transmissive lighting system |
/ |
Single high-power 5W LED, white, with continuously adjustable light intensity. N. A.0.5 spotlight with variable aperture stop |
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