At present, the AWL series wafer handlers have two models, AWL046 and AWL068, which can be used for 4/6-inch wafer inspection and 6/8-inch wafer inspection respectively. They have a wide range of adaptability and flexible matching, with freely adjustable inspection modes that fully comply with ergonomic design, and are comfortable and easy to operate.

AWL seriesAdvantages of wafer inspection system

360 ° macroscopic examination

The AWL series wafer inspection system has a macroscopic inspection arm that can achieve 360 ° rotation for macroscopic inspection of the crystal surface and back, making it easier to detect scratches and dust. The wafer can be tilted and observed freely through the operating lever. The tilt angle of the crystal surface is ≤ 70 °, the tilt angle of crystal back 1 is ≤ 90 °, and the tilt angle of crystal back 2 is ≤ 160 °. By using the rotation function and tilt angle, the entire front, back, and edges of the wafer can be visually inspected.

● Ergonomic design

The LCD display screen of the wafer inspection system can provide operators with a more intuitive visual experience, displaying the current inspection items and sequence clearly, and debugging parameters at a glance.

The manual quick release of the vacuum stage in the wafer inspection system can improve the comfort and work efficiency of the operator.

Application case of wafer defect inspection

AWL seriesTechnical specifications for wafer inspection system