overview

STACIS IIIc is a compact version of the STACIS III * * active isolation system. It provides equally excellent vibration isolation performance at a reduced height.

STACIS IIIc is very suitable for use on raised floors without or with very low floors, as the height of the standard STACIS III system can make the instrument too high.

In the three isolator configuration, the isolator height is less than 60% of the conventional STACIS III height. In systems with three or more isolators, the height will be between 60% and 70%, depending on the effective load setting. For detailed information, please refer to the specifications below.

Advantages of STACIS IIIc

Compared with the conventional STACIS III system, the isolator height * * is reduced by 42%, but the performance is not reduced.

STACIS is hundreds of times stronger than air isolators and has no limitations of any air isolation system. It does not have a "soft" suspension, unlike active air systems, the STACIS can be placed under tools with internal active air isolation systems, allowing both systems to operate in a * * state.

Unique serial design and proprietary high force piezoelectric technology

It can achieve a wide active bandwidth of 0.6 Hz to 150 Hz and * * active isolation performance with 90% vibration reduction starting from 2 Hz.

performance

Performance specifications

specifications

Design, size, environmental and utility requirements for isolators

DC-2020 Controller Specifications

STACIS users and application areas
1. Microelectronics and Semiconductors
▪ Chip testing
▪ microphotolithographic technique
▪ Mask calibration
2. Scientific research, nanotechnology
▪ SEM、TEM
▪ STEM、SPM
3. Laser table
▪ Life sciences, drug development
4. Industrial applications
▪ precision machining

Why choose an active system?
▪ Starting from<1Hz, strong ground vibrations are eliminated, and pneumatic platforms cannot effectively isolate vibrations at this low frequency
▪ Improve quality and production volume
▪ Smaller and more distinctive imaging capabilities
▪ frontier research
▪ More stable than pneumatic platforms
▪ * * Solution to Install Parameters at SEM Standard Locations
▪ Make the engineering cost of new laboratories and research equipment lower

Why choose STACIS for active systems
▪ It resonates with the voice of researchers and provides the most earthquake free environment possible.
▪ A powerful low-frequency isolation system on the market.
▪ At present, all SEM manufacturers have announced installation parameter requirements, and the required vibration parameters need to be met by an active vibration isolation system.
▪ STAIS * * was invented in the 1990s and further developed by TMC to develop and install thousands of active isolation systems, providing a reliable solution in the field of active isolation control.

Compared to pneumatic isolators, STACIS has several hundred higher rigiditytimes
The stable time, as a response to disturbances, is greatly shortened due to its unique series design, making it ideal for applications in mechanical manufacturing, dynamic loads, and independent rigid tabletops that require installation of lasers or light sources.

The following advantages are all * * in the industry
▪ The active isolation bandwidth of STACIS is 0.6Hz -150Hz
▪ Active vibration cancellation with 6 degrees of freedom, with a vibration interval of 8-10dB at 1Hz
▪ At 2-3Hz, the isolation can reach 90% (20dB)

Professional environmental investigation
1. Environmental investigation before and after installation, including vibration, magnetic field, and sound waves
2. After installation, environmental system certification can be provided
▪ Comprehensive environmental investigation services
▪ Issue a professional environmental report
▪ Provide vibration, magnetic field, sound wave detection and solutions
▪ TMC recommends practical solutions to users based on its extensive experience
▪ Over 40 years of industry experience, with expertise in the field**

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