The CVD system consists of a gas supply system, a tube furnace, and an exhaust system. The maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, 1700 degrees, and the heating range can be single temperature zone, double temperature zone, triple temperature zone, etc. The ultimate vacuum can reach 10-3Pa. The gas supply system is flow regulated and can be a proton flowmeter or a float flowmeter. The number of mixing channels can be mixed with 2, 3, 4, or 5 channels.
The KTL-CVD-1400 single temperature zone CVD system consists of three gas supply systems, KTL1400 tube furnace, and vacuum system.
(1) The hot end thickness D1 of silicon molybdenum rod is 7mm, which is commonly used by manufacturers as 6MM. The heating end is thick, not easy to bend, and the surface load of the rod is low, resulting in a long service life.
(2) It adopts hot bending technology, with uniform resistance and long service life
(3) Lu's cold end length is 210mm, and the 400X300X300 furnace has a length of 260. Generally, manufacturers use 180mm, and the long cold end has a low furnace top temperature.
(4) The surface of the silicon molybdenum rod has a dense amorphous oxide film, which can effectively protect the silicon molybdenum rod.
When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect
This atmosphere tube furnacecanEquipped with communication interfaces and software, the various parameters of the furnace can be directly controlled through a computer, and the PV and SV temperature values and instrument operation on the furnace can be observed from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved and retrieved at any time
(1) High quality high-purity alumina polycrystalline fiber solidification furnace formed by vacuum suction filtration.
(2) Adopting Japanese technology for molding.
(3) The furnace material has low heat capacity and low thermal conductivity, resulting in less heat dissipation, good insulation, and high reflectivity. Temperature field equilibrium.
(4) The furnace alumina wire is thin and long, with high temperature resistance and strong resistance to thermal expansion and contraction
(5) The furnace surface is smooth and not prone to powder loss.
(All imported electrical appliances certified by UL)