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MX6R wafer semiconductor inspection microscope
The various operations of the MX6R wafer semiconductor inspection microscope are designed according to ergonomics to reduce operator fatigue. Its modu
Product details
Wide field hinge type three eye observation tube
Just like a hinged three eyed observation tube, the orientation of the image is the same as the actual direction of the object, and the direction of the object's movement is the same as the direction of the image plane's movement, making it easy to observe and operate
Design of Large Travel Mobile Platform
Adopting a 6-inch flat platform design with a stroke of 158 × 158mm, it can be used for wafer or FPD detection of corresponding sizes, as well as array detection of small-sized samples.
High precision objective lens converter
The converter adopts precision bearing design, with a light and comfortable rotating feel, high repeatability positioning accuracy, and good control of the concentricity of the objective lens after conversion.
Steady rack structure design
The industrial inspection grade microscope body, low center of gravity, high rigidity, and high stability metal frame ensure the seismic resistance and imaging stability of the system.
Its front low hand position coarse fine adjustment coaxial focusing mechanism is equipped with a 100-240V wide voltage transformer, which can adapt to the grid voltage in different regions. The base is designed with a wind circulation cooling system inside, which will not cause the rack to overheat even after long-term use.
MX6RConfiguration parameters of semiconductor inspection microscope
Model number |
MX6R |
MX6RT |
Optional observation methods |
Bright field/Dark field/Polarized light/DIC |
Bright field/dark field/polarized light/DIC/transmitted light |
Optical system |
Infinite chromatic aberration correction optical system |
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Eyepiece |
PL10X/22 flat field high eye point eyepiece |
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Objective lens |
LMPL-BD infinite long working distance bright dark field metallographic objective lens |
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Observation tube |
Just like the observation tube, with a 25 ° hinge type three eyes and a beam splitting ratio, binocular: three eyes=100:0 or 0:100 |
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Converter |
5-hole inward tilting light dark field converter with DIC slot |
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5-hole inward tilting light dark field converter | ||
Carrier platform |
6” Three layer mechanical mobile platform, stroke 158x 158mm, glass worktable, right-hand position X and Y movable handwheel, with clutch handle, can move quickly |
6” Three layer mechanical mobile platform, reflection stroke 158x 158mm, transmission stroke 100x100mm, glass worktable, right-hand X and Y movable handwheel, with clutch handle, can move quickly |
Microscope body |
Coarse adjustment coaxial, coarse adjustment stroke 33mm, fine adjustment accuracy 0.001mm, with upper limit of coarse adjustment mechanism and tension adjustment device. Built in 90-240V wide voltage transformer, single power output |
Coarse adjustment coaxial, coarse adjustment stroke 33mm, fine adjustment accuracy 0.001mm, with upper limit of coarse adjustment mechanism and tension adjustment device. Built in 90-240V wide voltage transformer, dual power output |
Reflective Illuminator System |
Equipped with variable field of view aperture and aperture aperture, both can be centered; Equipped with color filter slots and polarizing device slots; Equipped with oblique lighting switch lever, 12V100W halogen lamp, continuously adjustable light intensity |
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Transmissive lighting system |
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Single high-power 5W LED, white, with continuously adjustable light intensity. N. A.0.5 spotlight with variable aperture stop |
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