Shanghai Beilan Optoelectronics Technology Co., Ltd
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Microscopic spectrophotometer (OPTM series)
The OPTM series spectrophotometer uses microscopic spectroscopy to measure absolute reflectance in small areas, allowing for high-precision analysis o
Product details

Measure the reflectivity of the target film, accurately measure the film thickness and optical constants! Non contact, Non destructive, Microscopic

The measurement time is only 1 second!

The OPTM series spectrophotometer uses microscopic spectroscopy to measure reflectance in small areas, allowing for high-precision analysis of film thickness/optical constants. Measure the thickness of coatings through non-destructive and non-contact methods, such as various films, chips, optical materials, and multilayer films. In terms of measurement time, it can achieve high-speed measurement of 1 second per point, and is equipped with software that can easily analyze optical constants even for first-time users

显微分光膜厚仪(OPTM系列)(图1)

Product features:

  • The head integrates the necessary functions for measuring film thickness

  • Measurement of high-precision reflectance (multilayer film thickness, optical constants) using microspectroscopy

  • 1:1 high-speed measurement

  • Optical system with wide range under microscopic spectroscopy (UV * * * near-infrared)

  • Security mechanism of regional sensors

  • Easy to analyze guide, beginners can also perform optical constant analysis

  • Independent measuring heads correspond to various inline customization requirements

  • Support various customizations

Measurement items:

  • **Reflectance measurement

  • Analysis of multilayer films

  • Optical constant analysis (n: refractive index, k: extinction coefficient)

Application:

  • Semiconductor: automatic adjustment of wafer samples, wafer bending detection

  • Optical components: detection of emissivity, bending, and other parameters of lens lenses

Product specifications and models


OPTM-A1

OPTM-A2

OPTM-A3

Wavelength Range

230 ~ 800 nm

360 ~ 1100 nm

900 ~ 1600 nm

Film thickness range

1nm ~ 35μm

7nm ~ 49μm

16nm ~ 92μm

Measurement time

1 second/1 o'clock

spot size

10 μ m (* * * less than about 5 μ m)

Photosensitive element

CCD

InGaAs

Light source specifications

Deuterium lamp+halogen lamp

halogen lamp

Power specifications

AC100V ± 10V 750VA (Automatic Sample Stand Specification)

size

555 (W) × 537 (D) × 568 (H) mm (Main body of automatic sample table specification)

weight

About 55kg (the main part of the automatic sample table specification)


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