The OTL-PECVD-1200-1400-1200 three temperature zone PECVD system consists of three sliding rod vacuum tube furnaces, a quartz vacuum chamber, an RF power supply, a GX gas supply system, an exhaust system, a vacuum measurement system, and an electric drive mechanism.

Main features:

1. Convert the gas inside the quartz vacuum chamber into an ionic state through an RF power supply.

2. PECVD requires lower temperatures for chemical vapor deposition compared to conventional CVD

3. The stress level of the deposited film can be controlled by the frequency of the RF power supply

4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency, and stability than ordinary CVD.

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy, and amorphous silicon (a-Si: H).

This three temperature zone PECVD system is a PECVD system that can quickly heat and cool. It is installed on three tube furnaces with a pair of electric sliding rails, which can be used as an electric sliding system. The maximum heating and cooling rate can reach 100 ° C/min. To achieve the fastest heating, the furnace can be preheated to the set temperature and then moved to the sample gradeSet. To achieve the fastest cooling, the furnace can be moved to the other end after the sample is heated. Heating and cooling rates can be achieved in vacuum or inert gas environments10 ° C/s is a low-cost, rapid heating and cooling dual temperature zone PECVD system.

This three temperature zone PECVD system uses Swedish Kanthal resistance wire and silicon carbon rod as heating elements, adopts a double-layer shell structure and a 30 segment program-controlled temperature control instrument, with phase-shift triggering and thyristor control. The furnace is made of Japanese imported alumina polycrystalline fiber material, and the two ends of the furnace tube are sealed with stainless steel flanges. Gas nozzles and valves are installed on the stainless steel flangesWith a pressure gauge, the vacuum degree during vacuuming can reach 10-3 Pa, divided into two temperature zones. The two temperature zones can be independently controlled and set to different temperatures, making it easy to use and operate. This furnace has the advantages of temperature field balance, low surface temperature, fast temperature rise and fall rate, and energy saving. It is suitable for high-temperature gas atmosphere burning in universities, research institutes, and industrial and mining enterprises Ideal product for the growth of graphene and various thin films.

(1) The thickness of the hot end of the silicon carbon rod is 14mm, which is 12mm commonly used by manufacturers. The heating end is thick, not easy to bend, and the surface load of the rod is low, resulting in a long service life.

（2) The length of the cold end is 210mm, and generally manufacturers use 180mm. The cold end is long and the furnace top temperature is low.

(3) The amorphous oxide film on the surface of silicon carbide rods is dense, which can effectively protect the carbon rods.

When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect

This atmosphere tube furnacecanEquipped with communication interfaces and software, the various parameters of the furnace can be directly controlled through a computer, and the PV and SV temperature values and instrument operation on the furnace can be observed from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved and retrieved at any time

(1) High quality high-purity alumina polycrystalline fiber solidification furnace formed by vacuum suction filtration.
(2) Adopting Japanese technology for molding.
(3) The furnace material has low heat capacity and low thermal conductivity, resulting in less heat dissipation, good insulation, and high reflectivity. Temperature field equilibrium.
(4) The furnace alumina wire is thin and long, with high temperature resistance and strong resistance to thermal expansion and contraction
(5) The furnace surface is smooth and not prone to powder loss.

(All imported electrical appliances certified by UL)