The small vacuum hot press machine has increased the temperature control range and upgraded the temperature control setting program, and is used for medium to low temperature bonding of substrates such as glass, silicon wafers, crystal cells, sapphire, quartz, etc. It is a specialized equipment for silicon-based hot press bonding processing. The vacuum hot press bonding machine can not only meet the requirements of low to medium temperature bonding under different gases, but also meet the requirements of low to medium temperature annealing in a vacuum environment; The temperature during the high and low temperature bonding and medium and low temperature annealing processes can be flexibly set and programmed; The bonding pressure can also be programmed and controlled within the range.

Picture of a small vacuum hot press machine

It is an important equipment for powder metallurgy, used for sintering beryllium, titanium, aluminum alloys, cobalt and nickel based alloys, tungsten, molybdenum, and special alloy steels.

The vacuum hot press machine consists of a sealed chamber, vacuum pumping, hot pressing, electrical control, nitrogen filling, water cooling, etc. It adopts a four column structure, and the guide column is subjected to high-frequency vacuum quenching treatment to achieve tensile and wear-resistant effects. The guide sleeve adopts high-temperature linear bearing guide sleeve as the guide, and the downward pressure is smooth and stable. The heating plate is vacuum quenched and tempered, and the surface is electroplated for long-term use without deformation or rust. The heating tube adopts a stainless steel electric heating wire buried casting type, which is non oxidizing, impact resistant, safe and reliable, quickly heats up, and has the advantages of long service life.

Introduction to the characteristics of vacuum hot pressing furnace:

1. This machine consists of a sealed chamber, vacuum pumping, hot pressing, electrical control, nitrogen filling, water cooling, etc. It adopts a four column structure, and the guide column is subjected to high-frequency vacuum quenching treatment to achieve tensile and wear-resistant effects. The guide sleeve adopts high-temperature linear bearing guide sleeve as the guide, and the downward pressure is smooth and stable.

2. The temperature of the upper and lower hot pressing plates can be independently controlled at 350 degrees with adjustable digital display, ensuring stable temperature while saving energy.

3. The electric heating adopts PID temperature indicator regulator to control and display the temperature of the hot plate, which has high temperature control accuracy, intuitive temperature display, and convenient adjustment. Using constant temperature control heating technology for precise temperature control.

4. Aluminum alloy work platform, with flat upper and lower surfaces, fast thermal conductivity, and uniformly heat-conducting heating plates that have undergone vacuum quenching and tempering treatment. The heating tube adopts a stainless steel electric heating wire buried casting type, which is non oxidizing, impact resistant, safe and reliable, quickly heats up, and has the advantages of long service life.

5. The optical tempered glass observation window on the front door is installed in the middle of the box door, which can clearly observe the changes of the internal test items during the test process.

6. The electrical control PLC control integrated machine can control the holding time and is suitable for the pressing time requirements of various products.

7. By using a precision pressure regulating valve for pressure adjustment and replenishment, the pressure can be precisely adjusted and the pressure size can be set to ensure the quality stability of the product. The cylinder pressing speed is manually adjusted, and different speed and pressure controls are selected for different materials.

8. The sealing material and unique silicone rubber sealing structure are used between the door and the door frame, which are sealed and anti-aging.

9. The heating area is large, and the heating plate can be customized according to customer requirements, covering commonly used chip sizes.

10. Nitrogen filled electromagnetic switch control, capable of nitrogen atmosphere protection, achieving non oxidation.

11. Add a set of water-cooled plates to the lower heating plate. The water-cooled system can maintain high temperature for a long time, quickly cool down the temperature, and ensure that the vacuum colloid does not overheat and continues to operate.

12. Adopting a unique vacuum hot pressing system, the bonding is greatly improved while ensuring that the chip is not damaged.

13. The operation console and pressurization equipment are integrated, easy to operate, compact and beautiful in structure.

Composite material vacuum hot pressing machine parameters

Bonding platform: 230 × 200 (length × width) mm;

Platform parallelism: 0.05mm;

Keyable chip thickness: 0-140mm;

Rated voltage: AC220V/50HZ;

Pressure range: 0~3.5KN;

Pressure display accuracy: ± 0.1KN

Rated power: 1.4KW;

Temperature control range: room temperature~300 ℃;

Temperature control accuracy: ± 1% (± 1 ℃ below 100 ℃);

Maximum temperature difference between upper and lower plates: 3 ℃;

Uniform heating rate: 4 ℃/min (below 100 ℃); 3℃/min(100℃~200℃); 2 ℃/min (above 200 ℃); Rapid heating rate: 10 ℃/min

Support temperature programming segments: 10 temperature control segments;

Vacuum degree: KPa level

External atmosphere interface: 2 × DN10

Dimensions: 420 × 260 × 610 (length × width × height) mm;

Weight: 120kg;